MULTI MON: Multi-Sequence Monitor [FC134]

MULTI MON: Multi-Sequence Monitor [FC134]


Specifications

Spec Description
S1Next multi-sequence monitor
S2Control status input
S3Step trigger
S4Emergency stop (E-STOP)
S5Hold/resume
S6Manual/auto permissive
S7Auto trigger
S8Insert trigger
S9Resume phase number
S10Insert step number
S11Insert recipe number
S12Spare
S13Phase 1 step
S14Phase 2 step
S15Phase 3 step
S16Phase 4 step
S17Phase 5 step
S18Phase 6 step
S19Phase 7 step
S20Phase 8 step
S21Normal phase 1
S22Normal phase 2
S23Normal phase 3
S24Normal phase 4
S25Normal phase 5
S26Normal phase 6
S27Normal phase 7
S28Normal phase 8
S29Fault phase 1
S30Fault phase 2
S31Fault phase 3
S32Fault phase 4
S33Fault phase 5
S34Fault phase 6
S35Fault phase 7
S36Fault phase 8
S37Phase 1 recipe
S38Phase 2 recipe
S39Phase 3 recipe
S40Phase 4 recipe
S41Phase 5 recipe
S42Phase 6 recipe
S43Phase 7 recipe
S44Phase 8 recipe

Outputs

Block Type Description
N Real Jump step number
N+1 Bit Jump step trigger
N+2 Real Recipe jump step
N+3 Real Current phase
N+4 Bit Insert step done
N+5 Bit Run/hold